A MEMS gravimeter with multi-axis gravitational sensitivity

Middlemiss, Richard P. and Campsie, Paul and Cunningham, William and Douglas, Rebecca and McIvor, Victoria and Belwanshi, Vinod and Hough, James and Rowan, Sheila and Paul, Douglas J. and Prasad, Abhinav and Hammond, Giles D.; (2022) A MEMS gravimeter with multi-axis gravitational sensitivity. In: INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings. INERTIAL 2022 - 2022 9th IEEE International Symposium on Inertial Sensors and Systems, Proceedings . IEEE, Piscataway, NJ. ISBN 9781665402828 (https://doi.org/10.1109/inertial53425.2022.9787754)

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Abstract

A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability of this device was demonstrated by measuring the Earth tides. The success of this device was enabled in part by its extremely low resonant frequency. This low frequency was achieved with a geometric anti-spring design, fabricated using well-established photolithography and dry etch techniques. Analytical models can be used to calculate the results of these non-linear oscillating systems, but the power of finite element analysis has not been fully utilised to explore the parameter space before now. In this article finite element models are used to investigate the behaviour of geometric anti-springs. These computer models provide the ability to investigate the effect of the fabrication material of the device: anisotropic <100> crystalline silicon. This is a parameter that is difficult to investigate analytically, but finite element modelling is used to take anisotropy into account. The finite element models are then used to demonstrate the design of a three-axis gravimeter enabling the gravity tensor to be measured - a significantly more powerful tool than the original single-axis device.

  • Item type:Book Section
    ID code:81375
    Dates:
    Date
    Event
    8 June 2022
    Published
    1 December 2021
    Accepted
    Notes:© 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Biomedical Engineering
    Depositing user: Pure Administrator
    Date deposited:06 Jul 2022 14:44
    Last modified:08 Apr 2024 14:16
    URI:https://strathprints.strath.ac.uk/id/eprint/81375
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