Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon
Wang, Jiqiang and Yan, Yongda and Li, Zihan and Geng, Yanquan and Luo, Xichun and Fan, Pengfei (2021) Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon. Precision Engineering, 72. pp. 480-490. ISSN 0141-6359 (https://doi.org/10.1016/j.precisioneng.2021.06.009)
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Abstract
Atomic force microscope (AFM) tip-based nanomilling is an emerging technology for machining nanostructures with a high rate of material removal and slight tip wear. However, subsurface damage induced by nanomilling is poorly understood. In this study, we investigated nanomilling-induced subsurface damage of single-crystal silicon experimentally and with molecular dynamics simulations. We studied the effect of clockwise and anticlockwise trajectories on the nanochannel morphology. The clockwise trajectory resulted in a 'U'-shaped nanochannel at a relatively low normal load. Transmission electron microscopy and Raman spectroscopy analysis of the nanochannel subsurface revealed atomic-scale defects, including dislocations, stacking faults, and amorphous silicon. Molecular dynamics simulations described the evolution of the phase transformation and subsurface damage. This work reveals the mechanism of subsurface damage of single-crystal silicon in nanomilling, which will facilitate the machining of nanostructures with minimal subsurface damage.
ORCID iDs
Wang, Jiqiang, Yan, Yongda, Li, Zihan, Geng, Yanquan, Luo, Xichun
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Item type: Article ID code: 77101 Dates: DateEvent30 November 2021Published3 July 2021Published Online29 June 2021AcceptedKeywords: atomic force microscope, nanomilling, single-crystal silicon, subsurface damage, phase transformation, Manufactures, Engineering design, Industrial and Manufacturing Engineering Subjects: Technology > Manufactures
Technology > Engineering (General). Civil engineering (General) > Engineering designDepartment: Faculty of Engineering > Design, Manufacture and Engineering Management Depositing user: Pure Administrator Date deposited: 14 Jul 2021 14:53 Last modified: 01 Nov 2023 14:02 URI: https://strathprints.strath.ac.uk/id/eprint/77101