MEMS enabled control of light-sheet microscopy optical beam paths

Bakas, Spyridon and Uttamchandani, Deepak and Toshiyoshi, Hiroshi and Bauer, Ralf; (2018) MEMS enabled control of light-sheet microscopy optical beam paths. In: 2018 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE, CHE. ISBN 9781509063741

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    Abstract

    The excitation and imaging optical beam paths for the design of a digitally controllable light-sheet microscopy system using a piezoelectric MEMS scanner and a thermal bimorph varifocal MEMS mirror, respectively, are presented.