A MEMS microphone inspired by Ormia for spatial sound detection

Zhang, Yansheng and Bauer, Ralf and Whitmer, William M. and Jackson, Joseph C. and Windmill, James F.C. and Uttamchandani, Deepak (2018) A MEMS microphone inspired by Ormia for spatial sound detection. In: The 31st IEEE International Conference on Micro Electro Mechanical Systems, 2018-01-21 - 2018-01-25, Belfast Waterfront.

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    Abstract

    This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea’s tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

    ORCID iDs

    Zhang, Yansheng, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Whitmer, William M., Jackson, Joseph C., Windmill, James F.C. ORCID logoORCID: https://orcid.org/0000-0003-4878-349X and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;