FIB Micro-/Nano-fabrication

Rajput, Nitul S. and Luo, Xichun (2015) FIB Micro-/Nano-fabrication. In: Micromanufacturing engineering and technology. Elsevier Limited, pp. 61-80. ISBN 9780323311496

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Abstract

Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.