Range extension of a bimorph varifocal micromirror through actuation by a Peltier element

Paterson, Alan and Bauer, Ralf and Li, Li and Lubeigt, Walter and Uttamchandani, Deepak (2015) Range extension of a bimorph varifocal micromirror through actuation by a Peltier element. IEEE Journal of Selected Topics in Quantum Electronics, 21 (4). 2701007. ISSN 1077-260X (https://doi.org/10.1109/JSTQE.2014.2381464)

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Abstract

A bimorph varifocal micromirror actuated thermoelectrically by a Peltier element is reported. The single crystal silicon micromirror is 1.2 mm in diameter with a centered 1 mm diameter gold coating for broadband reflection. The actuation principle is capable of varying the micromirror temperature above and below the ambient temperature, which contributed to a 57% improvement in the addressable curvature range in comparison to previously reported electrothermal and optothermal actuation techniques for the device. Altering the device temperature from 10 C to 100 C provided a mirror surface radius of curvature variation from 19.2 mm to 30.9 mm respectively. The experimental characterization of the micromirror was used as a basis for accurate finite element modeling of the device and its actuation. Negligible optical aberrations are observed over the operating range, enabling effectively aberration-free imaging. Demonstration in an optical imaging system illustrated sharp imaging of objects over a focal plane variation of 212 mm.

ORCID iDs

Paterson, Alan ORCID logoORCID: https://orcid.org/0000-0003-1255-3254, Bauer, Ralf ORCID logoORCID: https://orcid.org/0000-0001-7927-9435, Li, Li, Lubeigt, Walter and Uttamchandani, Deepak ORCID logoORCID: https://orcid.org/0000-0002-2362-4874;
  • Item type:Article
    ID code:50911
    Dates:
    Date
    Event
    31 August 2015
    Published
    18 December 2014
    Published Online
    6 December 2014
    Accepted
    Notes:(c) 2014 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
    Keywords:optical MEMS, temperature measurement, varifocal micromirror, micromirrors, silicon-on-insulator multi-user MEMS processes (SOIMUMPs), thermal actuation, Electrical Engineering. Electronics Nuclear Engineering, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
    Subjects:Technology > Electrical engineering. Electronics Nuclear engineering
    Department:Faculty of Engineering > Electronic and Electrical Engineering
    Technology and Innovation Centre > Sensors and Asset Management
    Depositing user: Pure Administrator
    Date deposited:06 Jan 2015 14:55
    Last modified:04 Nov 2023 05:43
    Related URLs:
    URI:https://strathprints.strath.ac.uk/id/eprint/50911
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