Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror
Paterson, Alan and Li, Li and Bauer, Ralf and Lubeigt, Walter and Uttamchandani, Deepak; (2014) Comparison of modeled and experimental behavior of a thermoelectrically actuated varifocal micromirror. In: International Conference on Optical MEMS and Nanophotonics. IEEE, GBR, pp. 157-158. ISBN 9780992841423 (https://doi.org/10.1109/OMN.2014.6924570)
Full text not available in this repository.Request a copyAbstract
The finite element analysis (FEA) simulation results of a bimorph silicon-gold varifocal micromirror (VFM) are reported. For a 1.2 mm diameter silicon VFM, the simulation shows that a variation of the surface radius of curvature (ROC) from 18.8 mm to 31.3 mm can be achieved between device temperatures of 10 °C and 100 °C. The ROC versus temperature relationship is highly sensitive to the values of Young's modulus and residual stress of the gold layer used in this model. The simulation results are compared with our experimentally measured ROCs obtained at different temperatures, yielding accurate modeling of the VFM behavior.
-
-
Item type: Book Section ID code: 50283 Dates: DateEvent17 August 2014PublishedSubjects: Technology > Electrical engineering. Electronics Nuclear engineering Department: University of Strathclyde > University of Strathclyde
Faculty of Engineering > Electronic and Electrical Engineering
Technology and Innovation Centre > Sensors and Asset ManagementDepositing user: Pure Administrator Date deposited: 12 Nov 2014 10:24 Last modified: 08 Apr 2024 13:15 Related URLs: URI: https://strathprints.strath.ac.uk/id/eprint/50283