Silicon for thin-film transistors

Wagner, Sigurd and Gleskova, Helena and Cheng, I. Chun and Wu, Ming (2003) Silicon for thin-film transistors. Thin Solid Films, 430 (1-2). pp. 15-19. ISSN 0040-6090

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Abstract

We are standing at the beginning of the industrialization of flexible thin-film transistor (TFT) backplanes. The two important research directions for the TFTs are (i) processability on flexible substrates and (ii) sufficient field-effect mobilities of electrons and holes to support complementary metal insulator semiconductor operation. The most important group of TFT capable semiconductors are the several modifications of silicon films: amorphous, nanocrystalline and microcrystalline. We summarize their TFT properties and their compatibility with foil substrate materials.