Micro-structured light emission from planar InGaN light-emitting diodes
Massoubre, David and Xie, Enyuan and Guilhabert, Benoit Jack Eloi and Herrnsdorf, Johannes and Gu, Erdan and Watson, Ian and Dawson, Martin (2013) Micro-structured light emission from planar InGaN light-emitting diodes. Semiconductor Science and Technology, 29 (1). 015005. ISSN 0268-1242
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Investigation of the surface modification of the p-type layer in GaN light-emitting diodes (LEDs) by exposure to a trifluoromethane plasma is reported. It is found that the plasma treatment reduces the conductivity of the p-GaN by several orders of magnitude, and when applied at room-temperature through a patterned mask, localized current channels into the active region of a p–i–n device are created. This provides a novel approach to laterally modulate the light emission from an LED over essentially planar areas. This technique allows the projection of high-resolution images from non-pixelated devices, and an example application of maskless pattern transfer with sub-micron features into photoresist is demonstrated.
| Author(s): | Massoubre, David, Xie, Enyuan  ORCID: https://orcid.org/0000-0001-7776-8091, Guilhabert, Benoit Jack Eloi ORCID: https://orcid.org/0000-0002-3986-8566, Herrnsdorf, Johannes ORCID: https://orcid.org/0000-0002-3856-5782, Gu, Erdan ORCID: https://orcid.org/0000-0002-7607-9902, Watson, Ian ORCID: https://orcid.org/0000-0002-8797-3993 and Dawson, Martin ORCID: https://orcid.org/0000-0002-6639-2989 | Item type: | Article |
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| ID code: | 46414 |
| Keywords: | light emitting diodes, InGaN, light emission, Physics, Materials Chemistry, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics |
| Subjects: | Science > Physics |
| Department: | Faculty of Science > Physics > Institute of Photonics Technology and Innovation Centre > Photonics |
| Depositing user: | Pure Administrator |
| Date deposited: | 07 Jan 2014 11:35 |
| Last modified: | 15 Nov 2019 05:40 |
| URI: | https://strathprints.strath.ac.uk/id/eprint/46414 |
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