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High-resolution cathodoluminescence hyperspectral imaging of nitride nanostructures

Edwards, Paul R. and Krishnan Jagadamma, Lethy and Bruckbauer, Jochen and Liu, Chaowang and Shields, Philip and Allsopp, Duncan and Wang, Tao and Martin, Robert W. (2012) High-resolution cathodoluminescence hyperspectral imaging of nitride nanostructures. Microscopy and Microanalysis, 18 (6). pp. 1212-1219. ISSN 1431-9276

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Abstract

Hyperspectral cathodoluminescence imaging provides spectrally and spatially resolved information on luminescent materials within a single dataset. Pushing the technique toward its ultimate nanoscale spatial limit, while at the same time spectrally dispersing the collected light before detection, increases the challenge of generating low-noise images. This article describes aspects of the instrumentation, and in particular data treatment methods, which address this problem. The methods are demonstrated by applying them to the analysis of nanoscale defect features and fabricated nanostructures in III-nitride-based materials.