A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

Li, L. and Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. In: OMN2011. IEEE, TUR, pp. 163-164. ISBN 9781457703362

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Abstract

A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.