A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

Li, L. and Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. In: OMN2011. IEEE, TUR, pp. 163-164. ISBN 9781457703362 (https://doi.org/10.1109/OMEMS.2011.6031038)

Abstract

A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.

ORCID iDs

Bauer, R. ORCID: https://orcid.org/0000-0001-7927-9435

Uttamchandani, D. ORCID: https://orcid.org/0000-0002-2362-4874

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• Item metadata

  Item type:	Book Section
  ID code:	41601
  Dates:	Date Event 2011 Published
  Keywords:	mems, microactuators, optical hybrid scanner, SOIMUMPs, symmetric hybrid , scanner, electrothermal , electrostatic , actuators, Electrical Engineering. Electronics Nuclear Engineering
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	19 Oct 2012 15:59
  Last modified:	01 Nov 2023 12:49
  Related URLs:	Scopus publication
  URI:	https://strathprints.strath.ac.uk/id/eprint/41601