A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators
Li, L. and Bauer, R. and Brown, G. and Uttamchandani, D.; (2011) A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators. In: OMN2011. IEEE, TUR, pp. 163-164. ISBN 9781457703362
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Abstract
A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.
Creators(s): |
Li, L., Bauer, R. ![]() ![]() | Item type: | Book Section |
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ID code: | 41601 |
Keywords: | mems, microactuators, optical hybrid scanner, SOIMUMPs, symmetric hybrid , scanner, electrothermal , electrostatic , actuators, Electrical engineering. Electronics Nuclear engineering |
Subjects: | Technology > Electrical engineering. Electronics Nuclear engineering |
Department: | Faculty of Engineering > Electronic and Electrical Engineering |
Depositing user: | Pure Administrator |
Date deposited: | 19 Oct 2012 15:59 |
Last modified: | 20 Jan 2021 15:28 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/41601 |
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