On interaction of RF plasmas and amorphous silicon

Pincik, E. and Gmucova, K. and Jergel, M. and Mullerova, J. and Gleskova, H. and Nadazdy, V. and van Swaaij, R. A. C. M. M. and Durny, R. and Brunner, R. and Zeman, M. and Kucera, M. and Ortega, L. and Zahoran, M.; Mudron, J. and Mullerova, J. and Sutta, P. and Harmatha, L., eds. (2002) On interaction of RF plasmas and amorphous silicon. In: Proceedings of the 8th international workshop on applied physics of condensed matter. Comenius University Press, SVK, pp. 214-215. ISBN 8080401861

Abstract

A chapter on interaction of RF plasmas and amorphous silicon

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• Item metadata

  Item type:	Book Section
  ID code:	33480
  Dates:	Date Event 2002 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	08 Nov 2011 14:27
  Last modified:	08 Apr 2024 12:47
  URI:	https://strathprints.strath.ac.uk/id/eprint/33480