Effects of mechanical strain on amorphous silicon thin-film transistors

Gleskova, H. and Wagner, S. and Soboyejo, W. and Suo, Z. (2002) Effects of mechanical strain on amorphous silicon thin-film transistors. In: Amorphous and heterogeneous silicon-based films – 2002. MRS Symposium Proceedings, 715 . Materials Research Society, Warrendale, PA, A3.4.1-A3.4.11. ISBN 9781558996519

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Abstract

This chapter looks at the effects of mechanical strain on amorphous silicon thin-film transistors