Novel processing technology for microelectronics

Wagner, S. and Gleskova, Helena and Sturm, J. C. and Suo, Z.; Street, R. A., ed. (2000) Novel processing technology for microelectronics. In: Technology and applications of hydrogenated amorphous silicon. Materials Science, 37 . Springer, Berlin, Germany, pp. 222-251. ISBN 9783540657149

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ORCID iDs

Wagner, S., Gleskova, Helena ORCID logoORCID: https://orcid.org/0000-0001-7195-9639, Sturm, J. C. and Suo, Z.; Street, R. A.