Picture of industrial chimneys polluting horizon

Open Access research shaping international environmental governance...

Strathprints makes available scholarly Open Access content exploring environmental law and governance, in particular the work of the Strathclyde Centre for Environmental Law & Governance (SCELG) based within the School of Law.

SCELG aims to improve understanding of the trends, challenges and potential solutions across different interconnected areas of environmental law, including capacity-building for sustainable management of biodiversity, oceans, lands and freshwater, as well as for the fight against climate change. The intersection of international, regional, national and local levels of environmental governance, including the customary laws of indigenous peoples and local communities, and legal developments by private actors, is also a signifcant research specialism.

Explore Open Access research by SCELG or the School of Law. Or explore all of Strathclyde's Open Access research...

Cathodoluminescence nano-characterization of semiconductors

Edwards, Paul R and Martin, Robert W (2011) Cathodoluminescence nano-characterization of semiconductors. Semiconductor Science and Technology, 26 (6).

[img]
Preview
Text (Edwards-Martin-SST-2011-Cathodoluminescence-nano-characterization-of-semiconductors)
Edwards_Martin_SST_2011_Cathodoluminescence_nano_characterization_of_semiconductors.pdf
Accepted Author Manuscript

Download (350kB) | Preview

Abstract

We give an overview of the use of cathodoluminescence (CL) in scanning electron microscopy (SEM) for the nano-scale characterization of semiconducting materials and devices. We discuss the technical aspects of the measurement, such as factors limiting the spatial resolution and design considerations for efficient collection optics. The advantages of more recent developments in the technique are outlined, including the use of the hyperspectral imaging mode and the combination of CL and other SEM-based measurements. We illustrate these points with examples from our own experience of designing and constructing CL systems and applying the technique to the characterization of III-nitride materials and nanostructures.