Cathodoluminescence nano-characterization of semiconductors
Edwards, Paul R and Martin, Robert W (2011) Cathodoluminescence nano-characterization of semiconductors. Semiconductor Science and Technology, 26 (6). 064005.
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Abstract
We give an overview of the use of cathodoluminescence (CL) in scanning electron microscopy (SEM) for the nano-scale characterization of semiconducting materials and devices. We discuss the technical aspects of the measurement, such as factors limiting the spatial resolution and design considerations for efficient collection optics. The advantages of more recent developments in the technique are outlined, including the use of the hyperspectral imaging mode and the combination of CL and other SEM-based measurements. We illustrate these points with examples from our own experience of designing and constructing CL systems and applying the technique to the characterization of III-nitride materials and nanostructures.
Creators(s): |
Edwards, Paul R ![]() ![]() | Item type: | Article |
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ID code: | 30546 |
Keywords: | optics, condensed matter, electrical matter, thin films, cathodoluminescence, Physics, Materials Chemistry, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics |
Subjects: | Science > Physics |
Department: | Faculty of Science > Physics Technology and Innovation Centre > Bionanotechnology Technology and Innovation Centre > Photonics |
Depositing user: | Pure Administrator |
Date deposited: | 10 May 2011 09:18 |
Last modified: | 02 Mar 2021 01:08 |
Related URLs: | |
URI: | https://strathprints.strath.ac.uk/id/eprint/30546 |
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