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Open Access research with a European policy impact...

The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by Strathclyde researchers, including by researchers from the European Policies Research Centre (EPRC).

EPRC is a leading institute in Europe for comparative research on public policy, with a particular focus on regional development policies. Spanning 30 European countries, EPRC research programmes have a strong emphasis on applied research and knowledge exchange, including the provision of policy advice to EU institutions and national and sub-national government authorities throughout Europe.

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Design and simulation of modified 1-D electrostatic torsional micromirrors with z-axis displacement

Li, L. and Uttamchandani, D.G. and Begbie, Mark (2008) Design and simulation of modified 1-D electrostatic torsional micromirrors with z-axis displacement. In: PIERS 2008 Hangzhou: Progress in Electromagnetics Research Symposium. Progress in Electromagnetics Research Symposium . The Electromagnetics Academy, pp. 922-924. ISBN 978-1-934142-00-4

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Micromirrors based on Micromechanical. systems (MEMS) have been essential components in many applications, such as micro confocal microscopy, optical data storage and biomedical imaging [1-3]. A variety of microfabrication and actuation technologies have been used to realize micromirrors, including electrothermal [3], electrostatic [1], etc., of which electrostatic torsional drive ha s been thought to be the most popular driving mechanism. K. E. Peterson [4] has developed the world first 1-D electrostatic driven torsional micromirror. The Lucent [5] Lambdroutor is one of famous and successful examples of 2-D electrostatic torsional micromirrors. For design improvement of this type of 2-D micromirror, Toshiyoshi et al. [6] have proposed a linearization method based on applying a small control voltage over a large bias voltage. Chiou et al. [7] have presented improved design to demonstrate linear stepping angles of 1-D micromirrors based on multiple electrodes. These developments are focus on realizing linear steps in angle. As mentioned by above articles, there are also displacements in z-axis as the micromirror is actuated, which have been ignored. The z-axis displacements have become a significant problem when the micromirrors are used on high resolution spatial scanning. Krishnamoorthy et al. [8] presents a dual-mode 1-D micromirror utilizing stacked multilayer vertical comb drive actuators, which can provide both piston and tilt motion. We have developed a z-axis displacement compensation concept for 2-D electrostatic torsional micromirrors previously [9].