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Gu, E. and Jeon, C.W. and Choi, H.W. and Rice, G.B. and Dawson, M.D. and Illy, E.K. and Knowles, M.R.H. (2003) Micromachining and dicing of sapphire, gallium nitride and micro-LED devices with a UV copper vapour laser. In: E-MRS Spring Meeting, 2003-06-10 - 2003-06-13. (Unpublished)