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ArticleLi, Li and Li, Ran and Lubeigt, Walter and Uttamchandani, Deepak (2013) Design, simulation and characterization of a bimorph varifocal micromirror and its application in an optical imaging system. Journal of Microelectromechanical Systems. ISSN 1057-7157 This list was generated on Tue May 21 02:40:07 2013 BST. |
