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ArticleChoubey, Bhaskar and Boyd, Euan and Armstrong, Ian and Uttamchandani, Deepak (2012) Determination of the anisotropy of Young's modulus using a coupled microcantilever array. Journal of Microelectromechanical Systems, 21 (5). pp. 1252-1260. ISSN 1057-7157 Boyd, Euan and Uttamchandani, Deepak (2012) Measurement of the anisotropy of Young's modulus in single-crystal silicon. Journal of Microelectromechanical Systems, 21 (1). pp. 243-249. ISSN 1057-7157 Boyd, Euan and Nock, Volker and Weiland, Dominik and Li, Xudong and Uttamchandani, Deepak (2011) Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers. Sensors and Actuators A: Physical, 172 (2). pp. 440-446. ISSN 0924-4247 Boyd, E.J. and Nock, V. and Li, X. and Uttamchandani, D. (2011) Density measurement of thin-films for micro-electromechanical systems using micro-cantilever structures. Thin Solid Films, 519 (22). pp. 7932-7935. ISSN 0040-6090 This list was generated on Tue Jun 18 22:37:44 2013 BST. |
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