Novel processing technology for microelectronics

Wagner, S. and Gleskova, Helena and Sturm, J. C. and Suo, Z.; Street, R. A., ed. (2000) Novel processing technology for microelectronics. In: Technology and applications of hydrogenated amorphous silicon. Materials Science, 37 . Springer, Berlin, Germany, pp. 222-251. ISBN 9783540657149

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• Item metadata

  Item type:	Book Section
  ID code:	33405
  Dates:	Date Event 2000 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering
  Depositing user:	Pure Administrator
  Date deposited:	01 Nov 2011 14:23
  Last modified:	08 Apr 2024 12:47
  Related URLs:	Publisher
  URI:	https://strathprints.strath.ac.uk/id/eprint/33405