Micro-manufacturing : research, technology outcomes and development issues

Qin, Y. and Brockett, A. and Ma, Y. and Razali, A. and Zhao, J. and Harrison, C. and Pan, W. and Dai, X. and Loziak, D. (2010) Micro-manufacturing : research, technology outcomes and development issues. International Journal of Advanced Manufacturing Technology, 47 (9-12). pp. 821-837. ISSN 1433-3015 (https://doi.org/10.1007/s00170-009-2411-2)

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Abstract

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing.