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The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by Strathclyde researchers, including by researchers from the Physical Activity for Health Group based within the School of Psychological Sciences & Health. Research here seeks to better understand how and why physical activity improves health, gain a better understanding of the amount, intensity, and type of physical activity needed for health benefits, and evaluate the effect of interventions to promote physical activity.

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Femtosecond laser machining of gallium nitride

Kim, T. and Kim, H.S. and Hetterich, M. and Jones, D. and Girkin, J.M. and Bente, E. and Dawson, M.D. (2001) Femtosecond laser machining of gallium nitride. Materials Science and Engineering B, 82 (1-3). pp. 262-264. ISSN 0921-5107

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Abstract

Ultrashort pulse laser ablation of gallium nitride (GaN) has been studied. Utilizing a 1 kHz femtosecond Ti:sapphire laser with a peak intensity of approximately 10(16) W cm(-2), we have successfully demonstrated controlled ablation of metal organic chemical vapour deposition and hydride vapour phase epitaxy grown GaN. Groove patterns 10-100 mum wide and as deep as 30 mum have been produced both in air and in a vacuum chamber and analyzed by scanning electron microscope and stylus profiling. This approach is demonstrated to be highly suitable for micromachining and controlled definition of features on a tens of micron length scale in materials such as GaN which are resistant to wet chemical etching.