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Femtosecond laser machining of gallium nitride

Kim, T. and Kim, H.S. and Hetterich, M. and Jones, D. and Girkin, J.M. and Bente, E. and Dawson, M.D. (2001) Femtosecond laser machining of gallium nitride. Materials Science and Engineering B, 82 (1-3). pp. 262-264. ISSN 0921-5107

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Abstract

Ultrashort pulse laser ablation of gallium nitride (GaN) has been studied. Utilizing a 1 kHz femtosecond Ti:sapphire laser with a peak intensity of approximately 10(16) W cm(-2), we have successfully demonstrated controlled ablation of metal organic chemical vapour deposition and hydride vapour phase epitaxy grown GaN. Groove patterns 10-100 mum wide and as deep as 30 mum have been produced both in air and in a vacuum chamber and analyzed by scanning electron microscope and stylus profiling. This approach is demonstrated to be highly suitable for micromachining and controlled definition of features on a tens of micron length scale in materials such as GaN which are resistant to wet chemical etching.

Item type: Article
ID code: 9996
Keywords: laser ablation, femtosecond pulse laser, gallium nitride, Optics. Light, Mechanics of Materials, Materials Science(all), Mechanical Engineering, Condensed Matter Physics
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 19 Jul 2011 13:50
    Last modified: 04 Sep 2014 18:56
    URI: http://strathprints.strath.ac.uk/id/eprint/9996

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