Picture of two heads

Open Access research that challenges the mind...

The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs. Strathprints provides access to thousands of Open Access research papers by University of Strathclyde researchers, including those from the School of Psychological Sciences & Health - but also papers by researchers based within the Faculties of Science, Engineering, Humanities & Social Sciences, and from the Strathclyde Business School.

Discover more...

External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

Poland, S.P. and Girkin, J.M. and Li, L. and Uttamchandani, D.G. (2009) External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4 (2). pp. 106-111. ISSN 1750-0443

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.