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External linearisation of a MEMS electrothermal scanner with application in a confocal microscope

Poland, S.P. and Girkin, J.M. and Li, L. and Uttamchandani, D.G. (2009) External linearisation of a MEMS electrothermal scanner with application in a confocal microscope. Micro and Nano Letters, 4 (2). pp. 106-111. ISSN 1750-0443

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A compensatory mapping (CM) technique for external linearisation of a MEMS electrothermally actuated optical scanner is reported. Each individual axis of a two-axis MEMS scanner was linearised by the CM technique, and the scanner was then incorporated into a confocal optical microscope configuration. Cross-talk in the scanner when both axes are driven simultaneously, and arising when a drive signal to one axis of the scanner produces a mechanical response in the orthogonal scan axis, was subsequently compensated for by using a look-up-table optimised using a random search algorithm.

Item type: Article
ID code: 9100
Keywords: external linearisation, compensatory mapping technique, MEMS electrothermal actuated optical scanner, two-axis MEMS scanner, confocal optical microscope configuration, lookup-table, random search algorithm, linearisation techniques, micromechanical devices, optical microscopes, optical scanners, random processes, Optics. Light, Electrical engineering. Electronics Nuclear engineering, Physics, Biomedical Engineering, Bioengineering, Materials Science(all), Condensed Matter Physics
Subjects: Science > Physics > Optics. Light
Technology > Electrical engineering. Electronics Nuclear engineering
Science > Physics
Department: Faculty of Science > Institute of Photonics
Faculty of Engineering > Electronic and Electrical Engineering
Depositing user: Strathprints Administrator
Date Deposited: 10 Nov 2009 09:44
Last modified: 10 Dec 2015 18:00

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