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A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner

Poland, S.P. and Li, L. and Uttamchandani, D.G. and Girkin, J.M. (2009) A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner. Proceedings of SPIE the International Society for Optical Engineering, 7172. p. 717203. ISSN 0277-786X

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Abstract

For in-vivo imaging applications the use of conventional confocal microscope systems are simply not practical due to their relatively large size and weight. There is, however, great interest from both the life science research community and the clinical profession for the development of compact and portable micro-optical instrumentation capable of achieving minimally invasive, in-vivo imaging of tissue with sub-cellular resolution. In this paper we describe a novel confocal micro-imaging system incorporating, at its core, a thermally driven, non-resonant two-axis MEMS scanner which serves as a substitute for the two single-axis galvanometer scanners commonly used in standard confocal imaging systems. In this paper we describe the non-linearity of such devices and a number of techniques to compensate for this.

Item type: Article
ID code: 9099
Keywords: in-vivo imaging applications, confocal microscope, micro-optical instrumentation, sub-cellular resolution, confocal micro-imaging system, non-resonant two-axis MEMS scanner, Optics. Light, Condensed Matter Physics, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Applied Mathematics, Computer Science Applications
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 09 Nov 2009 12:56
    Last modified: 28 Mar 2014 05:09
    URI: http://strathprints.strath.ac.uk/id/eprint/9099

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