Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03, Strasbourg, France. (Unpublished)
Full text not available in this repository. (Request a copy from the Strathclyde author)Abstract
This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.
| Item type: | Conference or Workshop Item (Paper) |
|---|---|
| ID code: | 9040 |
| Keywords: | photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light |
| Subjects: | Science > Physics > Optics. Light |
| Department: | Faculty of Science > Institute of Photonics |
| Related URLs: | |
| Depositing user: | Strathprints Administrator |
| Date Deposited: | 17 Nov 2009 13:56 |
| Last modified: | 04 Oct 2012 17:18 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/9040 |
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