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Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Gu, E. and Jeon, C.W. and Dawson, M.D. (2005) Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03, Strasbourg, France. (Unpublished)

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Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

Item type: Conference or Workshop Item (Paper)
ID code: 9040
Keywords: photolithography, ultraviolet LED, LED, micro-lenses, Optics. Light
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
Depositing user: Strathprints Administrator
Date Deposited: 17 Nov 2009 13:56
Last modified: 17 Jul 2013 15:22
URI: http://strathprints.strath.ac.uk/id/eprint/9040

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