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Microfabrication of free-standing gallium nitride using UV laser micromachining

Gu, E. and Howard, H. and Conneely, A. and O'Connor, G.M. and Edwards, P.R. and Martin, R.W. and Dawson, M.D. (2005) Microfabrication of free-standing gallium nitride using UV laser micromachining. In: European Materials Research Society 2005 Spring Meeting, 2005-05-31 - 2005-06-03. (Unpublished)

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Abstract

This paper is about microfabrication of free-standing gallium nitride using UV laser micromachining. It was presented at the 2005 European materials research society sprint meeting.