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High throughput scribing for the manufacture of LED components

Karnakis, D. and Lilly, E.K. and Knowles, M.R.H. and Gu, E. and Dawson, M.D. (2004) High throughput scribing for the manufacture of LED components. In: Proceedings of Photonics West 2004: Lasers and applications in science and engineering. SPIE Press. ISBN 9780819452771

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Abstract

This paper is about high throughput scribing for the manufacture of LED components. It was presented at the Photonics West conference in 2004.