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Microstructure fabrication in gallium nitride, silicon carbide and diamond

Gu, E. and Choi, H.W. and Jeon, C.W. and Rice, G.B. and Liu, C. and Watson, I.M. and Dawson, M.D. and Edwards, P.R. and Martin, R.W. (2003) Microstructure fabrication in gallium nitride, silicon carbide and diamond. In: Wide Bandgap Semiconductor Technology: Institute of Physics Day Meeting, 2003-09-17. (Unpublished)

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Abstract

This paper is about Microstructure fabrication in gallium nitride, silicon carbide and diamond. It was presented at the Institute of Physics Day Meeting on "Wide bandgap semiconductor technology" in 2003.