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GaN micro-LED arrays with integrated sapphire micro-lenses

Choi, H.W. and Jeon, C.W. and Liu, C. and Dawson, M.D. (2003) GaN micro-LED arrays with integrated sapphire micro-lenses. In: LEOS 2003: 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society. IEEE, pp. 654-655. ISBN 0-7803-7888-1

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Abstract

GaN micro-LED devices with integrated micro-lenses have been demonstrated. The micro-lenses, with a focal length of 24 microns, are fabricated on the polished backside of the sapphire substrate by ICP etching.