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Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

Jeon, C.W. and Choi, H.W. and Dawson, M.D. (2003) Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays. In: LEOS 2003: 16th Annual meeting of the IEEE Lasers & Electro-Optics Society. IEEE, pp. 878-879. ISBN 0-7803-7888-1

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Abstract

The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.