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CMOS-integrated flip-chip micro-pixel InGaN LED arrays for on-chip microfluorimetry

Griffin, C. and McKendry, J. and Zhang, H.X. and Gu, E. and Rae, B.R. and Henderson, R.K. and Renshaw, D. and Girkin, J.M. and Dawson, M.D. (2007) CMOS-integrated flip-chip micro-pixel InGaN LED arrays for on-chip microfluorimetry. IEEE Lasers and Electro-Optics Society Annual Meeting. 588 -589. ISSN 1092-8081

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Abstract

4times16 arrays of micro-pixellated InGaN LEDs, each of diameter 72 mum, have been flip-chipped onto CMOS driver backplanes which also contain single-photon avalanche photodiodes. Pattern-programmable control is demonstrated in continuous and nanosecond modes. Such devices show promise as miniaturized excitation and detection systems for microfluorimetry studies.