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Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarbrook, G.A. (2007) Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. In: 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, 2007-09-09 - 2007-09-14. (Unpublished)

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Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.