Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarbrook, G.A. (2007) Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. In: 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, 2007-09-09 - 2007-09-14, Berlin, Germany. (Unpublished)
Full text not available in this repository. (Request a copy from the Strathclyde author)Abstract
This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.
| Item type: | Conference or Workshop Item (Paper) |
|---|---|
| ID code: | 8989 |
| Notes: | Also available as a journal article at http://strathprints.strath.ac.uk/13999/ |
| Keywords: | micro-optics fabrication, diamond, chlorine inductively-coupled plasma, Optics. Light |
| Subjects: | Science > Physics > Optics. Light |
| Department: | Faculty of Science > Institute of Photonics Faculty of Science > Physics |
| Related URLs: | |
| Depositing user: | Strathprints Administrator |
| Date Deposited: | 03 Nov 2009 12:00 |
| Last modified: | 04 Oct 2012 17:21 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/8989 |
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