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Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarbrook, G.A. (2007) Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. In: 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, 2007-09-09 - 2007-09-14, Berlin, Germany. (Unpublished)

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Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.

Item type: Conference or Workshop Item (Paper)
ID code: 8989
Notes: Also available as a journal article at http://strathprints.strath.ac.uk/13999/
Keywords: micro-optics fabrication, diamond, chlorine inductively-coupled plasma, Optics. Light
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Faculty of Science > Physics
Related URLs:
Depositing user: Strathprints Administrator
Date Deposited: 03 Nov 2009 12:00
Last modified: 04 Oct 2012 17:21
URI: http://strathprints.strath.ac.uk/id/eprint/8989

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