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The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs.

Strathprints serves world leading Open Access research by the University of Strathclyde, including research by the Strathclyde Institute of Pharmacy and Biomedical Sciences (SIPBS), where research centres such as the Industrial Biotechnology Innovation Centre (IBioIC), the Cancer Research UK Formulation Unit, SeaBioTech and the Centre for Biophotonics are based.

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Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma

Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarbrook, G.A. (2007) Etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. In: 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides, 2007-09-09 - 2007-09-14. (Unpublished)

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Abstract

This paper is about etching and micro-optics fabrication in diamond using chlorine inductively-coupled plasma. It was presented at the 18th European conference on diamond, diamond-like materials, carbon nanotubes and nitrides in 2007.