Lee, C.L. and Gu, E. and Dawson, M.D. (2007) Micro-cylindrical and micro-ring lenses in CVD diamond. Diamond and Related Materials, 16 (4-7). pp. 944-948. ISSN 0925-9635
Full text not available in this repository. (Request a copy from the Strathclyde author)Abstract
Micro-cylindrical and micro-ring lenses have been fabricated on chemical vapour deposition (CVD) diamond using photo-resist reflow and inductively coupled plasma dry etching. The surface morphology of these micro-lenses was characterized using atomic force microscopy, revealing that they have a root-mean-squared surface roughness of less than 3 nm and a cross-sectional profile close to spherical in shape. The optical properties of the micro-lenses were characterized by a laser scanning transmission/reflection confocal microscope. The measured optical parameters are very close to the calculated values, indicating high structural and surface quality of the micro-lenses. The characteristics of these micro-lenses suggest that the approach used is suitable for fabricating complex diamond micro-optics with various functionalities.
| Item type: | Article |
|---|---|
| ID code: | 8978 |
| Keywords: | synthetic diamond, etching, surface characterization, optical properties, optics, Optics. Light |
| Subjects: | Science > Physics > Optics. Light |
| Department: | Faculty of Science > Institute of Photonics Faculty of Science > Physics |
| Related URLs: | |
| Depositing user: | Strathprints Administrator |
| Date Deposited: | 18 Sep 2009 13:54 |
| Last modified: | 12 Mar 2012 10:50 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/8978 |
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