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Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Lee, C.L. and Gu, E. and Dawson, M.D. and Friel, I. and Scarsbrook, G. (2008) Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma. Diamond and Related Materials, 17 (7-10). pp. 1292-1296. ISSN 0925-9635

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Abstract

The effect of Inductively-Coupled Plasma (ICP) etching on diamond using chlorine-based plasma has been investigated. The diamond materials studied include type IIa natural diamond, High Pressure and High Temperature (HPHT) diamond and Chemical Vapour Deposition (CVD) diamond. It was found that argon and chlorine (Ar/Cl2) ICP plasma etching can improve the smoothness of the diamond surface. By using this method, a minimum root-mean-squared (rms) surface roughness of 0.19 nm has been achieved. To demonstrate optimized Ar/Cl2 plasma etching, diamond spherical micro-lenses and micro-trenches were fabricated. Compared to argon and oxygen (Ar/O2) plasma etching, Ar/Cl2 plasma etching has a low selectivity with respect to the photo-resist mask, which enables an accurate control over the dimensions of the microstructures fabricated. The surface quality and profiles of these micro-lenses and micro-trenches were characterized by atomic force microscopy (AFM) and were shown to be better than those fabricated by Ar/O2 ICP plasma.

Item type: Article
ID code: 7787
Notes: Also available as a conference paper at http://strathprints.strath.ac.uk/8989/
Keywords: ICP etch, chlorine-based plasma, micro-optics, surface smoothing, inductively-coupled plasma etching, Optics. Light, Physics, Materials Chemistry, Physics and Astronomy(all), Chemistry(all), Mechanical Engineering, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering
Subjects: Science > Physics > Optics. Light
Science > Physics
Department: Faculty of Science > Institute of Photonics
Faculty of Science > Physics
Related URLs:
Depositing user: Miss Sharon Kelly
Date Deposited: 12 Dec 2009 14:07
Last modified: 04 Sep 2014 18:41
URI: http://strathprints.strath.ac.uk/id/eprint/7787

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