Picture of smart phone in human hand

World leading smartphone and mobile technology research at Strathclyde...

The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by University of Strathclyde researchers, including by Strathclyde researchers from the Department of Computer & Information Sciences involved in researching exciting new applications for mobile and smartphone technology. But the transformative application of mobile technologies is also the focus of research within disciplines as diverse as Electronic & Electrical Engineering, Marketing, Human Resource Management and Biomedical Enginering, among others.

Explore Strathclyde's Open Access research on smartphone technology now...

Monolithic RF MEMS inductor using silicon MEMS foundry process

Li, L. and Uttamchandani, D.G. (2006) Monolithic RF MEMS inductor using silicon MEMS foundry process. Micro and Nano Letters, 1 (1). pp. 5-8. ISSN 1750-0443

Full text not available in this repository. Request a copy from the Strathclyde author

Abstract

A successful design of a radio frequency inductor based on a silicon microelectromechanical system foundry process is presented. The suspended inductor has been realised in electroplated thick nickel with front side bulk micromachining of the substrate. The overall size of the inductor is ~1×1 mm. The inductors have been experimentally characterised, and inductances ~2 nH in the frequency range of 200 MHz to 7 GHz have been measured with a self-resonant frequency of 9.8 GHz. The peak measured value of the Q factor is 12 at 4 GHz. After de-embedding, the Q factor reaches 13 at 4.8 GHz. Simulation based on a parameter extraction method has been carried out for the inductor. There is a good agreement between simulated and experimental results.