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Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

Unamuno, A. and Uttamchandani, D.G. (2004) Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors. IEEE Photonics Technology Letters, 17 (1). pp. 202-204. ISSN 1041-1135

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Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.