Syms, R. and Zou, H. and Yao, J. and Uttamchandani, D.G. and Stagg, J. (2004) Scalable electrothermal MEMS actuator for optical fibre alignment. Journal of Micromechanics and Microengineering, 14 (12). pp. 1633-1639. ISSN 0960-1317Full text not available in this repository. (Request a copy from the Strathclyde author)
A new geometry of high-force electrothermal actuator is demonstrated using microelectromechanical systems technology. The actuator consists of two sets of inclined, parallel, suspended beams, which are tethered at one end and linked together at the other. The first set is divided into two halves, which are connected in series and heated electrically. The second set acts as a tether for the first, so that differential thermal expansion gives rise to a lateral deflection. The design can be scaled easily to increase the actuation force, which is sufficient to deflect a cantilevered optical fibre. A bi-directional fibre alignment device is formed from two opposed actuators, which are designed to grip the fibre, and a set of fixed mounting features. Prototype devices are demonstrated by deep reactive ion etching of bonded silicon-on-insulator, and in-plane alignment of single-mode fibre is demonstrated.
|Keywords:||force control, optical fiber, cantilever beam, thermal expansion, insulator technology, microelectromechanical device, integrated optics, electrothermics, Electrical engineering. Electronics Nuclear engineering, Mechanics of Materials, Mechanical Engineering, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering|
|Depositing user:||Strathprints Administrator|
|Date Deposited:||03 Nov 2008|
|Last modified:||22 Mar 2017 09:40|