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Design and evaluation of a MEMS optical chopper for fibre optic applications

Li, L. and Uttamchandani, D.G. (2004) Design and evaluation of a MEMS optical chopper for fibre optic applications. IEE Proceedings Science Measurement and Technology, 151 (2). pp. 77-84. ISSN 1350-2344

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Abstract

The design and evaluation of a MEMS-based chopper for optical measurements is reported. The overall dimensions of the chopper, including the microactuators and micromechanical suspension, are 1200×1200 μm making it very compact. The comb-actuator driven chopper, designed for use in conjunction with fibre optics, has been fabricated in silicon-on-insulator material which has been back-etched to create an optical path through the thickness of the substrate. General electro-mechanical design considerations, including factors to minimise the side instability of the comb drive, are described. Finite element modelling (FEM) of the chopper is backed up by simple theoretical results, and the results from the theoretical work verify the findings from the FEM. Optical modelling of the chopper is also reported. Experimentally, the device was driven from 0-34 V DC to measure its static characteristics. For dynamic characterisation, the device was operated from 0-28 V AC and its fundamental resonant frequency was measured to be 3 kHz. Experimental evaluation of the device characteristics are shown to closely match the theoretical predictions.

Item type: Article
ID code: 7067
Keywords: finite element analysis, micro-optics, microactuators, micromechanical devices, optical fibres, silicon-on-insulator, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering
Subjects: Technology > Electrical engineering. Electronics Nuclear engineering
Department: Faculty of Engineering > Electronic and Electrical Engineering
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 27 Oct 2008
    Last modified: 04 Sep 2014 16:08
    URI: http://strathprints.strath.ac.uk/id/eprint/7067

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