FIB Micro-/Nano-fabrication

Rajput, Nitul S. and Luo, Xichun; Qin, Yi, ed. (2015) FIB Micro-/Nano-fabrication. In: Micromanufacturing engineering and technology. Elsevier Limited, pp. 61-80. ISBN 9780323311496

Abstract

Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures.

ORCID iDs

Luo, Xichun ORCID: https://orcid.org/0000-0002-5024-7058

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• Item metadata

  Item type:	Book Section
  ID code:	58130
  Dates:	Date Event 15 May 2015 Published
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering Technology > Engineering (General). Civil engineering (General) > Engineering design
  Department:	Faculty of Engineering > Design, Manufacture and Engineering Management
  Depositing user:	Pure Administrator
  Date deposited:	13 Oct 2016 14:18
  Last modified:	11 Nov 2024 15:03
  Related URLs:	Publisher
  URI:	https://strathprints.strath.ac.uk/id/eprint/58130