Zhang, Yansheng and Bauer, Ralf and Windmill, James F. C. and Uttamchandani, Deepak (2016) Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), 2016-01-24 - 2016-01-28.
Zhang_etal_IEEEMEMS2016_multi_band_asymmetric_piezoelectric_MEMS_microphone_inspired_Ormia_Ochracea.pdf - Accepted Author Manuscript
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A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.
|Item type:||Conference or Workshop Item (Paper)|
|Notes:||© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.|
|Keywords:||MEMS microphone, bio-mimetic design, Ormia ochracea, pressure gradient microphone, membranes, piezoelectric transducers, micromechanical devices, Electrical engineering. Electronics Nuclear engineering, Electrical and Electronic Engineering|
|Subjects:||Technology > Electrical engineering. Electronics Nuclear engineering|
|Department:||Faculty of Engineering > Electronic and Electrical Engineering
Technology and Innovation Centre > Sensors and Asset Management
|Depositing user:||Pure Administrator|
|Date Deposited:||15 Apr 2016 08:08|
|Last modified:||02 Apr 2017 15:18|