Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea

Zhang, Yansheng and Bauer, Ralf and Windmill, James F. C. and Uttamchandani, Deepak; (2016) Multi-band asymmetric piezoelectric MEMS microphone inspired by the Ormia Ochracea. In: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, CHN, 1114 - 1117. ISBN 978-1-5090-1973-1 (https://doi.org/10.1109/MEMSYS.2016.7421830)

Preview

Text. Filename: Zhang_etal_IEEEMEMS2016_multi_band_asymmetric_piezoelectric_MEMS_microphone_inspired_Ormia_Ochracea.pdf Accepted Author Manuscript Download (863kB)| Preview

Abstract

A multi-band piezoelectric directional MEMS microphone is demonstrated based on a bio-mimetic design inspired by the parasitoid fly Ormia ochracea, using the PiezoMUMPs multi-user foundry process. The device achieves a directional sound field response within four frequency bands, all lying below 15 kHz. It acts as a pressure gradient microphone with hyper-cardioid polar patterns in all frequency bands, with the measured mechanical sensitivity being in good agreement with acoustic-structural simulations conducted in COMSOL Multiphysics. The maximum experimentally measured acoustic sensitivity of the device is 19.7 mV/Pa, located at a frequency of 7972 Hz and sound incidence normal to the microphone membrane.

• Share and Export
  

  RDF+XMLBibTeXRIOXX2 XMLRDF+N-TriplesJSONDublin CoreAtomSimple MetadataReferMETSHTML CitationASCII CitationOpenURL ContextObjectEndNoteOpenURL ContextObject in SpanMODSMPEG-21 DIDLEP3 XMLData Cite XMLRIS (EndNote Online, Zotero, Ref manager, etc)RDF+N3Multiline CSV
• Item metadata

  Item type:	Book Section
  ID code:	56164
  Dates:	Date Event 28 January 2016 Published 26 October 2015 Accepted
  Notes:	© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
  Subjects:	Technology > Electrical engineering. Electronics Nuclear engineering
  Department:	Faculty of Engineering > Electronic and Electrical Engineering Technology and Innovation Centre > Sensors and Asset Management
  Depositing user:	Pure Administrator
  Date deposited:	15 Apr 2016 08:08
  Last modified:	14 Apr 2024 00:11
  Related URLs:	Journal or Publication
  URI:	https://strathprints.strath.ac.uk/id/eprint/56164