Picture of smart phone in human hand

World leading smartphone and mobile technology research at Strathclyde...

The Strathprints institutional repository is a digital archive of University of Strathclyde's Open Access research outputs. Strathprints provides access to thousands of Open Access research papers by University of Strathclyde researchers, including by Strathclyde researchers from the Department of Computer & Information Sciences involved in researching exciting new applications for mobile and smartphone technology. But the transformative application of mobile technologies is also the focus of research within disciplines as diverse as Electronic & Electrical Engineering, Marketing, Human Resource Management and Biomedical Enginering, among others.

Explore Strathclyde's Open Access research on smartphone technology now...

Quantitive simulation of in situ reflectance data from metal organic vapour phase epitaxy of GaN on sapphire

Liu, C. and Watson, I.M. (2007) Quantitive simulation of in situ reflectance data from metal organic vapour phase epitaxy of GaN on sapphire. Semiconductor Science and Technology, 22. pp. 629-635. ISSN 0268-1242

Full text not available in this repository. Request a copy from the Strathclyde author

Abstract

Multi-wavelength in situ reflectometry at normal incidence has been applied to monitoring metal organic vapour phase epitaxy of GaN films on sapphire (0 0 0 1) substrates. A new quantitative analysis model has been developed to incorporate time-dependent light scattering by a rough surface, and a time-dependent vertical growth rate during growth on a rough surface, into the virtual interface model that has previously been applied to multilayer structures with optically smooth surfaces and interfaces. It is shown that the vertical growth rate increases as the surface roughness decreases in the early stage of high-temperature GaN growth, reaching a limiting value when the surface becomes optically smooth. The time dependence of growth rate is correlated with microscopic crystal growth mechanisms on the rough surface, which involve mass transport on the facets and/or mass exchange between the growing surface and gas-phase ambient. Our optical modelling is supported by direct morphological investigations of films from growths terminated at various stages, using atomic force microscopy. High-temperature optical constants of GaN layers extracted from the simulations are well matched to literature values.