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Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

Jeon, C.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17 (9). pp. 1887-1889. ISSN 1041-1135

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Abstract

We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.

Item type: Article
ID code: 5268
Keywords: semiconductors, adhesives, aluminium compounds, gallium compounds, indium compounds, light emitting diodes microlenses, optical arrays, optical polymers, photonics, Optics. Light, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 31 Jan 2008
    Last modified: 04 Sep 2014 16:31
    URI: http://strathprints.strath.ac.uk/id/eprint/5268

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