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Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

Jeon, C.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17 (9). pp. 1887-1889. ISSN 1041-1135

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Abstract

We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.