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The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs. Strathprints provides access to thousands of Open Access research papers by University of Strathclyde researchers, including those from the School of Psychological Sciences & Health - but also papers by researchers based within the Faculties of Science, Engineering, Humanities & Social Sciences, and from the Strathclyde Business School.

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Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

Jeon, C.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17 (9). pp. 1887-1889. ISSN 1041-1135

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We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.