Jeon, C.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes. IEEE Photonics Technology Letters, 17 (9). pp. 1887-1889. ISSN 1041-1135Full text not available in this repository. (Request a copy from the Strathclyde author)
We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.
|Keywords:||semiconductors, adhesives, aluminium compounds, gallium compounds, indium compounds, light emitting diodes microlenses, optical arrays, optical polymers, photonics, Optics. Light, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering|
|Subjects:||Science > Physics > Optics. Light|
|Department:||Faculty of Science > Physics > Institute of Photonics|
|Depositing user:||Strathprints Administrator|
|Date Deposited:||31 Jan 2008|
|Last modified:||06 Jan 2017 05:51|