Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Fabrication and evaluation of GaN negative and bifocal microlenses

Choi, H.W. and Gu, E. and Liu, C. and Girkin, J.M. and Dawson, M.D. (2005) Fabrication and evaluation of GaN negative and bifocal microlenses. Journal of Applied Physics, 97 (063101). ISSN 0021-8979

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

Methods of fabricating negative and bifocal microlens arrays have been demonstrated in this paper. The technique of photoresist molding using a sapphire positive lens template was used for the patterning of negative microlenses, while the bifocal microlens arrays were fabricated using a two-step etch process. In both cases, the lenses were etched using inductively coupled plasma. Microlenses with diameters as small as 10 µm have been demonstrated and were characterized using atomic force microscopy and confocal microscopy. The lens arrays were found to be smooth, uniform, and to have focal lengths consistent with their design and calculated values.

Item type: Article
ID code: 5257
Keywords: gallium compounds, semiconductor epitaxial layers, microlenses, micromechanical devices, optical fabrication, optical arrays, atomic force microscopy, photonics, optics, Optics. Light
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 31 Jan 2008
    Last modified: 16 Jul 2013 20:07
    URI: http://strathprints.strath.ac.uk/id/eprint/5257

    Actions (login required)

    View Item