Picture of a sphere with binary code

Making Strathclyde research discoverable to the world...

The Strathprints institutional repository is a digital archive of University of Strathclyde research outputs. It exposes Strathclyde's world leading Open Access research to many of the world's leading resource discovery tools, and from there onto the screens of researchers around the world.

Explore Strathclyde Open Access research content

Fabrication of matrix-addressable micro-LED arrays based on a novel etch technique

Choi, H.W. and Jeon, C.W. and Dawson, M.D. (2004) Fabrication of matrix-addressable micro-LED arrays based on a novel etch technique. Journal of Crystal Growth, 268 (3-4). pp. 527-530. ISSN 0022-0248

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

A novel method of etching which allows the direct interconnection of multiple GaN-based devices is introduced. The mesa structures of devices are etched using an isotropic recipe which produces tapered sidewalls. The extent of inclination can be readily controlled through various etching parameters, which include the ICP power, plate power and pressure, thus modifying the vertical and lateral etch components. This approach has been successfully adopted in the fabrication of interconnect and matrix-addressable micro-LEDs, which offer superior optical and electrical performance and a high degree of uniformity compared to similar devices fabricated using conventional processes.