Strathprints Home | Open Access | Browse | Search | User area | Copyright | Help | Library Home | SUPrimo

Fabrication of two-dimensional InGaN-based micro-LED arrays

Jeon, C.W. and Kim, K.S. and Dawson, M.D. (2002) Fabrication of two-dimensional InGaN-based micro-LED arrays. Physica Status Solidi A, 192 (2). pp. 325-328. ISSN 1862-6300

Full text not available in this repository. (Request a copy from the Strathclyde author)

Abstract

We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.

Item type: Article
ID code: 5227
Keywords: plasma, mechanics, chemistry, Optics. Light
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Related URLs:
    Depositing user: Strathprints Administrator
    Date Deposited: 24 Jan 2008
    Last modified: 16 Jul 2013 19:36
    URI: http://strathprints.strath.ac.uk/id/eprint/5227

    Actions (login required)

    View Item