Jeon, C.W. and Kim, K.S. and Dawson, M.D. (2002) Fabrication of two-dimensional InGaN-based micro-LED arrays. Physica Status Solidi A, 192 (2). pp. 325-328. ISSN 1862-6300
Full text not available in this repository. (Request a copy from the Strathclyde author)Official URL: http://dx.doi.org/10.1002/1521-396X(200208)192:2<3...
Abstract
We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.
| Item type: | Article |
|---|---|
| ID code: | 5227 |
| Keywords: | plasma, mechanics, chemistry, Optics. Light |
| Subjects: | Science > Physics > Optics. Light |
| Department: | Faculty of Science > Institute of Photonics |
| Related URLs: | |
| Depositing user: | Strathprints Administrator |
| Date Deposited: | 24 Jan 2008 |
| Last modified: | 12 Mar 2012 10:42 |
| URI: | http://strathprints.strath.ac.uk/id/eprint/5227 |
Actions (login required)
| View Item |