Jeon, C.W. and Kim, K.S. and Dawson, M.D. (2002) Fabrication of two-dimensional InGaN-based micro-LED arrays. Physica Status Solidi A, 192 (2). pp. 325-328. ISSN 1862-6300Full text not available in this repository. (Request a copy from the Strathclyde author)
We have successfully fabricated two-dimensional InGaN-based 12 × 12 micro-light emitting diode (LED) arrays with individually addressable emitters having diameters of 8 and 12 m. A new planarisation scheme including gap-filling with plasma enhanced chemical vapour deposition (PECVD) SiO2 and a chemical-mechanical polishing process was successfully developed for the electrical isolation of individual diodes. The uniformity of elements within an array was demonstrated through their electroluminescence and I-V characteristics.
|Keywords:||plasma, mechanics, chemistry, Optics. Light, Materials Chemistry, Surfaces, Coatings and Films, Surfaces and Interfaces, Electronic, Optical and Magnetic Materials, Electrical and Electronic Engineering, Condensed Matter Physics|
|Subjects:||Science > Physics > Optics. Light|
|Department:||Faculty of Science > Institute of Photonics|
|Depositing user:||Strathprints Administrator|
|Date Deposited:||24 Jan 2008|
|Last modified:||29 Apr 2016 08:04|