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A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators

Lì, Lì and Bauer, Ralf and Brown, Gordon D.A. and Uttamchandani, Deepak G. (2012) A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators. In: International Conference on Optical MEMS and Nanophotonics (OMN), 2012. IEEE, Piscataway, NJ, United States, pp. 73-74. ISBN 9781457715112

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Abstract

A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.