Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS

Sun, Jining and Chang, Wenlong and Luo, Xichun (2009) Comparison of diamond drilling and laser drilling techniques in glass drilling for fabrication of MEMS. In: 9th euspen International Conference, 2009-06-02 - 2009-06-05.

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• Item metadata

  Item type:	Conference or Workshop Item(Paper)
  ID code:	45160
  Dates:	Date Event June 2009 Published
  Subjects:	Technology > Manufactures
  Department:	Faculty of Engineering > Design, Manufacture and Engineering Management
  Depositing user:	Pure Administrator
  Date deposited:	15 Oct 2013 10:17
  Last modified:	09 Apr 2024 05:50
  Related URLs:	Event
  URI:	https://strathprints.strath.ac.uk/id/eprint/45160