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Diamond double-sided micro-lenses and reflection gratings

Lee, C.L. and Dawson, M.D. and Gu, E. (2010) Diamond double-sided micro-lenses and reflection gratings. Optical Materials, 32 (9). pp. 1123-1129. ISSN 0925-3467

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Abstract

Double-sided micro-lenses have been successfully fabricated on natural diamond substrates using photoresist reflow method followed by Inductively Coupled Plasma (ICP) etching. The micro-lenses were fabricated on both sides of the substrates which were aligned to each other. The optical properties of these lenses were characterised by a laser scanning transmission/reflection confocal microscope. It has been confirmed by the confocal microscopy technique that the laser beam was focused twice as it shone through the substrates. The focal length was calculated based on refraction formula at the spherical surface which has been derived from Fermat's principle. The top focused point was found lying within the substrates while the bottom focused point lying outside of the substrates. Both focal lengths of the top and bottom micro-lenses agree well with the theoretical calculation based on the refraction formula. This demonstrates the functionality of the double-sided micro-lenses. In addition, highly smooth diffraction gratings (surface rms roughness of 1 nm) with near-vertical sidewalls (85 ± 5°) have also been successfully fabricated on the HPHT diamond substrate utilising SiO2 as mask and Reactive Ion Etching (RIE) and ICP plasma etching. The optical functionality of the diamond reflection grating has been confirmed by the reflection measurement.

Item type: Article
ID code: 41478
Keywords: diamond double-sided micro-lenses, diamond micro-grating, optical properties, inductively-coupled plasma etching, Optics. Light, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Computer Science(all)
Subjects: Science > Physics > Optics. Light
Department: Faculty of Science > Institute of Photonics
Faculty of Science > Physics
Related URLs:
Depositing user: Pure Administrator
Date Deposited: 16 Oct 2012 12:59
Last modified: 27 Mar 2014 08:51
URI: http://strathprints.strath.ac.uk/id/eprint/41478

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