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Strathprints serves world leading Open Access research by the University of Strathclyde, including research by the Strathclyde Institute of Pharmacy and Biomedical Sciences (SIPBS), where research centres such as the Industrial Biotechnology Innovation Centre (IBioIC), the Cancer Research UK Formulation Unit, SeaBioTech and the Centre for Biophotonics are based.

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High precision determination of the InN content of Al1-xInxN thin films by Rutherford backscattering spectrometry

Magalhaes, S. and Barradas, N. P. and Alves, E. and Watson, I. M. and Lorenz, K. (2012) High precision determination of the InN content of Al1-xInxN thin films by Rutherford backscattering spectrometry. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 273. pp. 105-108. ISSN 0168-583X

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Abstract

n this work a careful manual analysis of Rutherford backscattering spectrometry spectra is discussed to determine the InN content of Al1−xInxN thin films grown on GaN buffer layers. The main source of error arises from the fact that the low signal of Al is superimposed to the high signal of Ga from the GaN buffer layer. The uncertainties in the derived InN fraction are discussed. Furthermore, it is shown that channelling effects only have a minor influence on the compositional analysis of the studied films although they can significantly reduce the count rate and distort the shape of the spectra.