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Micromachined components for ultrasonic transducers and scanners

Farlow, R. and Galbraith, W. and Puccio, J.J. and Hayward, G. (2003) Micromachined components for ultrasonic transducers and scanners. In: IEEE International Ultrasonics Symposium 2003, 2003-10-05 - 2003-10-08.

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Abstract

Customised theoretical methods, computer models and laser micromachining techniques have been developed as tools that are currently being employed in research concerning the design and fabrication of novel ultrasonic transducers, as well as a miniature scanner driven by a particularly simple type of ultrasonic motor. All of the current work involves laser cutting, milling and drilling of piezoceramics, piezopolymers and single crystal piezoelectric materials.